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[Example of Production] Dual-Sided Pattern Offset Inspection Unit

Adopting an original electric revolver! It is integrated with the frame without using off-the-shelf actuators.

We would like to introduce our "Dual-Sided Microscope Measurement Unit." It features an original electric revolver that allows for high-precision alignment of the optical axes of the upper and lower objective lenses. Additionally, it is equipped with an auto stage that incorporates high-precision θ rotation on a thin, flat XY stage capable of high-speed drive. 【Features】 ■ Measurement of patterns on both sides of the workpiece 　(Size: W500×D780×H700) ■ Adoption of an original electric revolver ■ High-precision alignment of the optical axes of the upper and lower objective lenses ■ Auto stage with high-precision θ rotation on a thin, flat XY stage capable of high-speed drive *For more details, please refer to the PDF document or feel free to contact us.